Development of Contact Materials for Semiconductor Devices. Ohmic Contacts on Semiconducting Diamond.
نویسندگان
چکیده
منابع مشابه
Specific contact resistance measurements of ohmic contacts to semiconducting diamond
A simplified version of the specific contact resistance measurement scheme of G. K. Reeves [Solid State Electronics 23, 487 (1980)] has been developed. Its applicability to semiconducting diamond is demonstrated using four sample types: epitaxial films doped to mid 1019 acceptors/cm3 on (100) and (110) type IIa substrates; type IIb diamonds 0.25 mm thick, and type IIb diamonds thinned to 0.035-...
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ژورنال
عنوان ژورنال: Materia Japan
سال: 1994
ISSN: 1340-2625,1884-5843
DOI: 10.2320/materia.33.750